A Condition Change Detection Method for Solar Conversion Efficiency in Solar Cell Manufacturing Processes
Abstract
A solar cell manufacturing process typically has multiple, serial fabrication stages. This paper proposes an in-process method for detecting process changes in terms of product quality by studying multichannel sensing signals collected in the epitaxy stage, which significantly influences the solar conversion efficiency (SCE) of the final product.
Type
Publication
IEEE Transactions on Semiconductor Manufacturing
Juan Du
Assistant Professor
My research interests include knowledge-infused data science for quality improvement, industrial data analytics and machine learning, and system informatics and control for manufacturing applications.